Kla tencor profilometer manual

Tencor P2-Profilometer Operating Instructions Before proceeding ensure the UP sign is displayed on the Profilometer, if not do not continue. If you encounter any problems duri ng operation of the tool, please place the tool in the down state and contact a memb er of staff / put in a service request. KLA-Tencor P KLA-TENCOR Pjpg. An advanced profilometer capable of measuring surface morphology and film thickness as large as mm. P6 Profilometer Operating Procedure I. Introduction The KLA-Tencor P-6 profiler is a highly sensitive surface profiler that measures step height. The key features of P-6 include: A vertical range of µm (Do NOT exceed). Substrates up to 6 inches, with maximum thickness of 20 mm.

The Alpha-Step ®, Tencor ™ P-series and HRP ® stylus profilometers enable high-precision, 2D and 3D surface metrology. The stylus profilers measure step height, roughness, bow and stress with industry-leading stability and reliability for your RD and production metrology requirements. f) See the manual for programming Feature Detection, Filters Cursors, etc. g) For 3D scans, also enter Y Scan Size, # of Traces, and Y Spacing. The minimum for Y Spacing is 1 µm. Check that the Approx. Total time is not too long. 2D scan recipe 3D scan recipe 4. 54 D/D User Manual KLA-TENCOR CONFIDENTIAL -- RESTRICTED DISTRIBUTION 10/9/14 Chapter 4–Basic Operation Preliminary Zoom Lens – These controls adjust the digital zoom in the video camera. There are four digital zoom magnifications: 1x, x, 2x and 4x. Figure Control Panel Tab Viewing the stylus in the Video Window.

The Alpha-Step D is an affordable, easy-to-use benchtop stylus profiler with a manual X-Y stage for 2D step height and surface roughness measurements. 1 ก.ย. The KLA P-7 is a stylus contact profiler capable of mm scan lengths with ~10A resolution and ~20A noise floor. It has a multi- capacitor head. 1 ก.พ. Tencor P Long Scan Profiler. Operation Manual. Sitek Process Solutions. Technology Way Bldg. A-3, Rocklin, CA